Harold Persing
8Patents
3h-index
18Co-inventors
46Inventor score
Filing activity: Apr 2, 2004 → Jun 24, 2011
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7397048B2 | Technique for boron implantation | Electricity | 17 | Active |
| US7132672B2 | Faraday dose and uniformity monitor for plasma based ion implantation | Electricity | 9 | Expired |
| US7528389B2 | Profile adjustment in plasma ion implanter | Electricity | 4 | Active |
| US7687787B2 | Profile adjustment in plasma ion implanter | Electricity | 3 | Active |
| US7615748B2 | Outgassing rate detection | Electricity | 1 | Active |
| US7638781B2 | Local pressure sensing in a plasma processing system | Electricity | 0 | Active |
| US8877654B2 | Pulsed plasma to affect conformal processing | Electricity | 0 | Active |
| US8728587B2 | Closed loop process control of plasma processed materials | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.