Helmut Kirschner
6Patents
5h-index
14Co-inventors
60Inventor score
Filing activity: Jul 2, 1976 → Oct 28, 1998
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6095898A | Process and device for polishing semiconductor wafers | Performing Operations; Transporting | 38 | Expired |
| US5049200A | Process for the hydrophilizing and/or cement-residue-removing surface treatment of silicon wafers | Electricity | 28 | Expired |
| US4042419A | Process for the removal of specific crystal structure defects from semiconductor discs and the product thereof | Emerging Cross-Sectional Technologies | 15 | Expired |
| US4070797A | Nitrogen-free anionic and non-ionic surfactants in a process for producing a haze-free semiconduct | Electricity | 8 | Expired |
| US4057142A | Packaging of semiconductor discs | Performing Operations; Transporting | 7 | Expired |
| US4114175A | Shutter mechanism | Physics | 3 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.