Inventor · Tokyo, JP

Hidetaka Oshio

8Patents
2h-index
23Co-inventors
40Inventor score

Filing activity: Nov 13, 2018 → Oct 11, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US10727059B2 Highly etch selective amorphous carbon film Electricity 3 Active
US11527408B2 Multiple spacer patterning schemes Electricity 2 Active
US11469107B2 Highly etch selective amorphous carbon film Electricity 2 Active
US11145509B2 Method for forming and patterning a layer and/or substrate Electricity 1 Active
US12112949B2 Highly etch selective amorphous carbon film Electricity 0 Active
US12183578B2 Method for forming and patterning a layer and/or substrate Electricity 0 Active
US12014927B2 Highly etch selective amorphous carbon film Electricity 0 Active
US11315787B2 Multiple spacer patterning schemes Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.