Hirofumi Takeguchi
28Patents
4h-index
22Co-inventors
59Inventor score
Filing activity: Aug 27, 2002 → May 22, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6811962B2 | Method for developing processing and apparatus for supplying developing solution | Physics | 19 | Expired |
| US6709174B2 | Apparatus and method for development | Performing Operations; Transporting | 16 | Expired |
| US7901514B2 | Substrate cleaning method and developing apparatus | Emerging Cross-Sectional Technologies | 7 | Active |
| US7604013B2 | Substrate cleaning method and developing apparatus | Emerging Cross-Sectional Technologies | 5 | Active |
| US8026048B2 | Developing apparatus and developing method | Emerging Cross-Sectional Technologies | 4 | Active |
| US9256131B2 | Developing method for developing apparatus | Physics | 4 | Active |
| US8956694B2 | Developing apparatus, developing method and storage medium | Physics | 4 | Active |
| US7823534B2 | Development device and development method | Emerging Cross-Sectional Technologies | 3 | Active |
| US7918182B2 | Developing device and developing method | Physics | 3 | Active |
| US8865396B2 | Developing method and developing apparatus | Physics | 3 | Active |
| US6991385B2 | Method for developing processing and apparatus for supplying developing solution | Physics | 2 | Expired |
| US9731226B2 | Solution treatment apparatus and solution treatment method | Electricity | 2 | Active |
| US7806076B2 | Developing apparatus and method | Physics | 2 | Active |
| US9690202B2 | Developing method, developing apparatus and storage medium | Electricity | 1 | Active |
| US7665918B2 | Developing apparatus, developing method and storage medium | Electricity | 1 | Active |
| US8440266B2 | Developing device, developing method and storage medium | Physics | 1 | Active |
| US7841787B2 | Rinsing method, developing method, developing system and computer-read storage medium | Electricity | 1 | Active |
| US10022652B2 | Solution treatment apparatus and solution treatment method | Electricity | 1 | Active |
| US7896562B2 | Developing method, developing apparatus and storage medium | Physics | 1 | Active |
| US8147153B2 | Rinsing method, developing method, developing system and computer-read storage medium | Electricity | 1 | Active |
| US9878267B2 | Solution treatment apparatus and solution treatment method | Electricity | 1 | Active |
| US8029624B2 | Rinse method and developing apparatus | Electricity | 0 | Active |
| US11769661B2 | Substrate processing method and substrate processing apparatus | Performing Operations; Transporting | 0 | Active |
| US8469614B2 | Substrate treatment method, computer storage medium and substrate treatment apparatus | Physics | 0 | Active |
| US10901320B2 | Developing method, developing apparatus, and computer-readable recording medium | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.