Inventor · Shanghai, CN

Hunglin Chen

7Patents
1h-index
10Co-inventors
40Inventor score

Filing activity: Dec 20, 2012 → Jun 18, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US8865482B2 Method of detecting the circular uniformity of the semiconductor circular contact holes Emerging Cross-Sectional Technologies 37 Active
US9269639B2 Method of detecting and measuring contact alignment shift relative to gate structures in a semicondcutor device Electricity 1 Active
US12198061B2 Method and apparatus for predicting yield of semiconductor devices Electricity 0 Active
US9080863B2 Method for monitoring alignment between contact holes and polycrystalline silicon gate Electricity 0 Active
US8987013B2 Method of inspecting misalignment of polysilicon gate Electricity 0 Active
US11299683B2 Liquid fuel Chemistry; Metallurgy 0 Active
US8658438B2 Measurement of lateral diffusion of implanted ions in doped well region of semiconductor devices Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.