Ilya Perlov
47Patents
31h-index
28Co-inventors
85Inventor score
Filing activity: Dec 19, 1986 → Oct 16, 2009
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5000113A | Thermal CVD/PECVD reactor and use for thermal chemical vapor deposition of silicon dioxide and in-situ multi-step planarized process | Electricity | 781 | Expired |
| US5421893A | Susceptor drive and wafer displacement mechanism | Electricity | 635 | Expired |
| US5738574A | Continuous processing system for chemical mechanical polishing | Electricity | 491 | Expired |
| US4872947A | CVD of silicon oxide using TEOS decomposition and in-situ planarization process | Electricity | 431 | Expired |
| US5362526A | Plasma-enhanced CVD process using TEOS for depositing silicon oxide | Electricity | 406 | Expired |
| US6283692A | Apparatus for storing and moving a cassette | Emerging Cross-Sectional Technologies | 402 | Expired |
| US6146463A | Apparatus and method for aligning a substrate on a support member | Emerging Cross-Sectional Technologies | 373 | Expired |
| US5516367A | Chemical vapor deposition chamber with a purge guide | Emerging Cross-Sectional Technologies | 349 | Expired |
| US4892753A | Process for PECVD of silicon oxide using TEOS decomposition | Electricity | 344 | Expired |
| US6167834A | Thermal CVD/PECVD reactor and use for thermal chemical vapor deposition of silicon dioxide and in-situ multi-step planarized process | Electricity | 298 | Expired |
| US5856240A | Chemical vapor deposition of a thin film onto a substrate | Emerging Cross-Sectional Technologies | 251 | Expired |
| US5804507A | Radially oscillating carousel processing system for chemical mechanical polishing | Performing Operations; Transporting | 157 | Expired |
| US5964653A | Carrier head with a flexible membrane for a chemical mechanical polishing system | Performing Operations; Transporting | 137 | Expired |
| US5354715A | Thermal chemical vapor deposition of silicon dioxide and in-situ multi-step planarized process | Electricity | 108 | Expired |
| US5951770A | Carousel wafer transfer system | Emerging Cross-Sectional Technologies | 98 | Expired |
| US5695568A | Chemical vapor deposition chamber | Emerging Cross-Sectional Technologies | 80 | Expired |
| US6468353B1 | Method and apparatus for improved substrate handling | Emerging Cross-Sectional Technologies | 58 | Expired |
| US6082951A | Wafer cassette load station | Emerging Cross-Sectional Technologies | 51 | Expired |
| US5755886A | Apparatus for preventing deposition gases from contacting a selected region of a substrate during deposition processing | Electricity | 50 | Expired |
| US6287386A | Carousel wafer transfer system | Emerging Cross-Sectional Technologies | 50 | Expired |
| US5935338A | Chemical vapor deposition chamber | Emerging Cross-Sectional Technologies | 47 | Expired |
| US6086457A | Washing transfer station in a system for chemical mechanical polishing | Electricity | 47 | Expired |
| US5871811A | Method for protecting against deposition on a selected region of a substrate | Electricity | 43 | Expired |
| USRE36623E | Process for PECVD of silicon oxide using TEOS decomposition | General | 42 | Expired |
| US6103014A | Chemical vapor deposition chamber | Emerging Cross-Sectional Technologies | 40 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.