Inventor · Saratoga, CA, US

James C. Wang

16Patents
6h-index
40Co-inventors
66Inventor score

Filing activity: May 24, 1999 → Feb 9, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US6284093A Shield or ring surrounding semiconductor workpiece in plasma chamber Emerging Cross-Sectional Technologies 51 Expired
US6689249B2 Shield or ring surrounding semiconductor workpiece in plasma chamber Emerging Cross-Sectional Technologies 21 Expired
US6537918B2 Method for etching silicon oxynitride and dielectric antireflection coatings Electricity 13 Expired
US6291356A Method for etching silicon oxynitride and dielectric antireflection coatings Electricity 12 Expired
US8066551B2 Retaining ring with shaped surface Emerging Cross-Sectional Technologies 12 Active
US7927190B2 Retaining ring with shaped surface Emerging Cross-Sectional Technologies 7 Active
US8585468B2 Retaining ring with shaped surface Emerging Cross-Sectional Technologies 6 Active
US7815495B2 Pad conditioner Performing Operations; Transporting 5 Active
US9937601B2 Retaining ring with Shaped Surface Emerging Cross-Sectional Technologies 4 Active
US10766117B2 Retaining ring with shaped surface Emerging Cross-Sectional Technologies 3 Active
US11260500B2 Retaining ring with shaped surface Emerging Cross-Sectional Technologies 3 Active
US9186773B2 Retaining ring with shaped surface Emerging Cross-Sectional Technologies 2 Active
US7749048B2 Polishing pad conditioning process Performing Operations; Transporting 1 Active
US11850703B2 Method of forming retaining ring with shaped surface Emerging Cross-Sectional Technologies 0 Active
US11770022B2 Nanocrystalline magnetic conductive sheet for wireless charging and preparation method therefor Emerging Cross-Sectional Technologies 0 Active
US11577361B2 Retaining ring with shaped surface and method of forming Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.