Jeffrey E. Krampert
15Patents
3h-index
16Co-inventors
53Inventor score
Filing activity: Sep 29, 2009 → Sep 27, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8328494B2 | In vacuum optical wafer heater for cryogenic processing | Electricity | 4 | Active |
| US7977652B2 | Optical heater for cryogenic ion implanter surface regeneration | Electricity | 3 | Active |
| US8585115B2 | Method and apparatus for lifting a horizontally-oriented substrate from a cassette | Electricity | 3 | Active |
| US9417138B2 | Gas coupled probe for substrate temperature measurement | Physics | 2 | Active |
| US12014898B2 | Active temperature control for RF window in immersed antenna source | Electricity | 1 | Active |
| US10925146B1 | Ion source chamber with embedded heater | Electricity | 1 | Active |
| US10569299B2 | Hydrophobic shafts for use in process chambers | Performing Operations; Transporting | 1 | Active |
| US9218990B2 | Method and apparatus for holding a plurality of substrates for processing | Electricity | 1 | Active |
| US9865433B1 | Gas injection system for ion beam device | Electricity | 1 | Active |
| US8550520B2 | Method and apparatus for manipulating a substrate | Electricity | 1 | Active |
| US9175710B2 | Contained ceramic fastener | Mechanical Engineering; Lighting; Heating | 1 | Active |
| US9070730B2 | Method and apparatus for removing a vertically-oriented substrate from a cassette | Emerging Cross-Sectional Technologies | 0 | Active |
| US9212949B2 | Technique for temperature measurement and calibration of semiconductor workpieces using infrared | Electricity | 0 | Active |
| US9520264B2 | Method and apparatus for clamping and cooling a substrate for ion implantation | Emerging Cross-Sectional Technologies | 0 | Active |
| US10974276B2 | Hydrophobic shafts for use in process chambers | Performing Operations; Transporting | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.