Inventor · Rowley, MA, US

John D. Pollock

23Patents
10h-index
17Co-inventors
72Inventor score

Filing activity: Nov 21, 1977 → Dec 16, 2016

Most-cited inventions

PatentTitleAreaCited byStatus
US5984391A Microfeature wafer handling apparatus and methods Emerging Cross-Sectional Technologies 472 Expired
US4726689A Linear gas bearing with integral vacuum seal for use in serial process ion implantation equipment Emerging Cross-Sectional Technologies 50 Expired
US5996528A Method and apparatus for flowing gases into a manifold at high potential Electricity 39 Expired
US5421889A Method and apparatus for inverting samples in a process Emerging Cross-Sectional Technologies 38 Expired
US7135691B2 Reciprocating drive for scanning a workpiece through an ion beam Electricity 17 Expired
US6428262B1 Compact load lock system for ion beam processing of foups Emerging Cross-Sectional Technologies 17 Expired
US4680474A Method and apparatus for improved ion dose accuracy Emerging Cross-Sectional Technologies 16 Expired
US6082297A Encapsulated thermofoil heater apparatus and associated methods Electricity 16 Expired
US6777687B2 Substrate positioning system Electricity 11 Expired
US4172804A Method of preparing fire retardant insulation Emerging Cross-Sectional Technologies 10 Expired
US7141809B2 Method for reciprocating a workpiece through an ion beam Electricity 7 Expired
US6806479B1 Apparatus and method for reducing implant angle variations across a large wafer for a batch disk Electricity 7 Expired
US7323695B2 Reciprocating drive for scanning a workpiece Electricity 7 Expired
US6765219B2 Hybrid scanning system and methods for ion implantation Electricity 6 Expired
US7381977B2 Ion beam profiler Electricity 3 Active
US9057129B2 Implant method and implanter by using a variable aperture Electricity 2 Active
US6921907B2 Substrate positioning system Electricity 0 Expired
US8669539B2 Implant method and implanter by using a variable aperture Electricity 0 Active
US8124508B2 Method for low temperature ion implantation Electricity 0 Active
US8987691B2 Ion implanter and ion implant method thereof Electricity 0 Active
US8304330B2 Method for low temperature ion implantation Electricity 0 Active
US10718052B2 Rotating disk reactor with ferrofluid seal for chemical vapor deposition Electricity 0 Active
US8039374B2 Method for low temperature ion implantation Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.