Inventor · Suwon-si, KR

JongWan Choi

8Patents
3h-index
24Co-inventors
49Inventor score

Filing activity: Aug 30, 2012 → Mar 30, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US10529554B2 Method for forming silicon nitride film selectively on sidewalls or flat surfaces of trenches Electricity 359 Active
US8883611B2 Methods of fabricating semiconductor devices having air gaps in dielectric layers Electricity 14 Active
US9196630B2 Semiconductor devices having carbon-contained porous insulation over gate stack structures Electricity 4 Active
US9780113B2 Method for fabricating semiconductor device including a first ILD with sloped surface on a stacked structure and a second ILD on the first ILD Electricity 3 Active
US9281361B2 Semiconductor devices and methods of fabricating the same Electricity 1 Active
US11823866B2 Thin film forming method Electricity 0 Active
US11676812B2 Method for forming silicon nitride film selectively on top/bottom portions Electricity 0 Active
US10720322B2 Method for forming silicon nitride film selectively on top surface Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.