Inventor · Yokohama, JP

Jun Yashima

30Patents
7h-index
20Co-inventors
65Inventor score

Filing activity: Jul 28, 2006 → Oct 7, 2019

Most-cited inventions

PatentTitleAreaCited byStatus
US7601968B2 Charged particle beam writing method and apparatus Electricity 13 Active
US8309283B2 Method and apparatus for writing Electricity 10 Active
US7740991B2 Beam dose computing method and writing method and record carrier body and writing apparatus for determining an optimal dose of a charged particle beam Electricity 9 Active
US8103980B2 Beam dose computing method and writing method and record carrier body and writing apparatus Electricity 8 Active
US8065635B2 Method for resizing pattern to be written by lithography technique, and charged particle beam writing method Electricity 8 Active
US8122390B2 Charged particle beam writing apparatus, and apparatus and method for correcting dimension error of pattern Performing Operations; Transporting 7 Active
US8563953B2 Charged particle beam writing apparatus and charged particle beam writing method Electricity 7 Active
US8552405B2 Charged particle beam writing apparatus and charged particle beam writing method Electricity 5 Active
US8352889B2 Beam dose computing method and writing method and record carrier body and writing apparatus Electricity 4 Active
US8188449B2 Charged particle beam drawing method and apparatus Electricity 3 Active
US8429575B2 Method for resizing pattern to be written by lithography technique, and charged particle beam writing method Electricity 3 Active
US8183545B2 Charged particle beam writing apparatus, charged particle beam writing method and apparatus of processing data for charged particle beam writing Electricity 3 Active
US9548183B2 Charged particle beam writing apparatus, and charged particle beam writing method Electricity 2 Active
US8669537B2 Charged particle beam writing apparatus and method Electricity 2 Active
US8563952B2 Charged particle beam writing apparatus Emerging Cross-Sectional Technologies 2 Active
US9153420B2 Charged particle beam writing apparatus and charged particle beam writing method Electricity 2 Active
US8466440B2 Charged particle beam drawing apparatus and control method thereof Electricity 1 Active
US8527913B2 Method for resizing pattern to be written by lithography technique, and charged particle beam writing method Electricity 1 Active
US8878149B2 Charged particle beam writing apparatus and charged particle beam writing method Electricity 1 Active
US9141750B2 Charged particle beam writing apparatus and irradiation time apportionment method of charged particle beams for multiple writing Electricity 1 Active
US9659747B2 Method of generating write data for energy beam writing apparatus, method of writing with energy beam, and energy beam writing apparatus Electricity 0 Active
US9006691B2 Charged particle beam writing apparatus and charged particle beam writing method using a generated frame that surrounds a first data processing block Electricity 0 Active
US9934935B2 Multi charged particle beam writing apparatus and multi charged particle beam writing method Electricity 0 Active
US9188853B2 Charged particle beam drawing apparatus and control method thereof Electricity 0 Active
US8796650B2 Charged particle beam drawing method and apparatus Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.