Junghwan Sung
6Patents
6h-index
12Co-inventors
49Inventor score
Filing activity: Jun 19, 2002 → Dec 16, 2005
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7005372B2 | Deposition of tungsten nitride | Electricity | 136 | Expired |
| US7141494B2 | Method for reducing tungsten film roughness and improving step coverage | Emerging Cross-Sectional Technologies | 121 | Expired |
| US7691749B2 | Deposition of tungsten nitride | Electricity | 81 | Active |
| US7262125B2 | Method of forming low-resistivity tungsten interconnects | Electricity | 72 | Expired |
| US6905543B1 | Methods of forming tungsten nucleation layer | Chemistry; Metallurgy | 46 | Expired |
| US7107998B2 | Method for preventing and cleaning ruthenium-containing deposits in a CVD apparatus | Chemistry; Metallurgy | 45 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.