Kerry Spurgin
5Patents
3h-index
8Co-inventors
46Inventor score
Filing activity: Jun 29, 1993 → Dec 24, 2008
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5358891A | Trench isolation with planar topography and method of fabrication | Emerging Cross-Sectional Technologies | 35 | Expired |
| US5985735A | Trench isolation process using nitrogen preconditioning to reduce crystal defects | Emerging Cross-Sectional Technologies | 33 | Expired |
| US6118168A | Trench isolation process using nitrogen preconditioning to reduce crystal defects | Emerging Cross-Sectional Technologies | 19 | Expired |
| US7601637B2 | Atomic layer deposited tantalum containing adhesion layer | Electricity | 0 | Active |
| US7605469B2 | Atomic layer deposited tantalum containing adhesion layer | Electricity | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.