Inventor · San Jose, CA, US

Kirk Ostrowski

7Patents
4h-index
23Co-inventors
53Inventor score

Filing activity: Sep 20, 2002 → Jun 30, 2017

Most-cited inventions

PatentTitleAreaCited byStatus
US6693043B1 Method for removing photoresist from low-k films in a downstream plasma system Electricity 26 Expired
US8129281B1 Plasma based photoresist removal system for cleaning post ash residue Electricity 22 Active
US8591661B2 Low damage photoresist strip method for low-K dielectrics Electricity 7 Active
US8716143B1 Plasma based photoresist removal system for cleaning post ash residue Electricity 5 Active
US11062897B2 Metal doped carbon based hard mask removal in semiconductor fabrication Electricity 2 Active
US9564344B2 Ultra low silicon loss high dose implant strip Electricity 2 Active
US9613825B2 Photoresist strip processes for improved device integrity Electricity 2 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.