Knut Beekman
6Patents
4h-index
9Co-inventors
42Inventor score
Filing activity: Feb 17, 1999 → Sep 4, 2003
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6544858B1 | Method for treating silicon-containing polymer layers with plasma or electromagnetic radiation | Electricity | 81 | Expired |
| US6242366A | Methods and apparatus for treating a semiconductor substrate | Emerging Cross-Sectional Technologies | 37 | Expired |
| US6627535B2 | Methods and apparatus for forming a film on a substrate | Emerging Cross-Sectional Technologies | 18 | Expired |
| US6929831B2 | Methods of forming nitride films | Emerging Cross-Sectional Technologies | 6 | Expired |
| US6831010B2 | Method and depositing a layer | Electricity | 1 | Expired |
| US6905962B2 | Method of depositing a layer | Electricity | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.