Lance G. Hellwig
10Patents
8h-index
7Co-inventors
61Inventor score
Filing activity: Apr 18, 1995 → Sep 14, 2011
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5518549A | Susceptor and baffle therefor | Electricity | 536 | Expired |
| US5789309A | Method and system for monocrystalline epitaxial deposition | Emerging Cross-Sectional Technologies | 25 | Expired |
| US5843234A | Method and apparatus for aiming a barrel reactor nozzle | Chemistry; Metallurgy | 20 | Expired |
| US5792273A | Secondary edge reflector for horizontal reactor | Chemistry; Metallurgy | 14 | Expired |
| US7878562B2 | Semiconductor wafer carrier blade | Emerging Cross-Sectional Technologies | 11 | Active |
| US7462246B2 | Modified susceptor for barrel reactor | Emerging Cross-Sectional Technologies | 9 | Expired |
| US8042697B2 | Low thermal mass semiconductor wafer support | Electricity | 8 | Active |
| US8404049B2 | Epitaxial barrel susceptor having improved thickness uniformity | Chemistry; Metallurgy | 8 | Active |
| US8220647B2 | Low thermal mass semiconductor wafer boat | Electricity | 2 | Active |
| US8220646B2 | Low thermal mass semiconductor wafer plate | Electricity | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.