Lucy Chen
6Patents
4h-index
13Co-inventors
46Inventor score
Filing activity: Apr 2, 2015 → Apr 22, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10707086B2 | Etching methods | Electricity | 36 | Active |
| US10544505B2 | Deposition or treatment of diamond-like carbon in a plasma reactor | Electricity | 14 | Active |
| US10249495B2 | Diamond like carbon layer formed by an electron beam plasma process | Electricity | 13 | Active |
| US11043375B2 | Plasma deposition of carbon hardmask | Electricity | 4 | Active |
| US9852923B2 | Mask etch for patterning | Electricity | 1 | Active |
| US10790153B2 | Methods and apparatus for electron beam etching process | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.