Inventor · San Jose, CA, US

Lynn Ryle

14Patents
12h-index
22Co-inventors
70Inventor score

Filing activity: Jul 15, 1994 → Jul 7, 2000

Most-cited inventions

PatentTitleAreaCited byStatus
US5475889A Automatically adjustable brush assembly for cleaning semiconductor wafers Performing Operations; Transporting 68 Expired
US5745946A Substrate processing system Emerging Cross-Sectional Technologies 52 Expired
US5861066A Method and apparatus for cleaning edges of contaminated substrates Emerging Cross-Sectional Technologies 39 Expired
US6272712A Brush box containment apparatus Electricity 35 Expired
US6334229B1 Apparatus for cleaning edges of contaminated substrates Emerging Cross-Sectional Technologies 32 Expired
US5727332A Contamination control in substrate processing system Electricity 28 Expired
US5762084A Megasonic bath Emerging Cross-Sectional Technologies 28 Expired
US5794299A Containment apparatus Emerging Cross-Sectional Technologies 27 Expired
US5924154A Brush assembly apparatus Electricity 19 Expired
US5606251A Method and apparatus for detecting a substrate in a substrate processing system Emerging Cross-Sectional Technologies 18 Expired
US5862560A Roller with treading and system including the same Emerging Cross-Sectional Technologies 16 Expired
US6059889A Method for processing a substrate using a system having a roller with treading Emerging Cross-Sectional Technologies 12 Expired
US6119295A Brush assembly apparatus Electricity 7 Expired
US5809832A Roller positioning apparatus Emerging Cross-Sectional Technologies 5 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.