Manish Hemkar
7Patents
2h-index
28Co-inventors
47Inventor score
Filing activity: Jun 10, 2004 → Mar 31, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7262116B2 | Low temperature epitaxial growth of silicon-containing films using close proximity UV radiation | Electricity | 6 | Expired |
| US7396743B2 | Low temperature epitaxial growth of silicon-containing films using UV radiation | Electricity | 5 | Expired |
| US7718225B2 | Method to control semiconductor film deposition characteristics | Electricity | 2 | Active |
| US10269614B2 | Susceptor design to reduce edge thermal peak | Electricity | 1 | Active |
| US8728944B2 | Method of removing contaminants and native oxides from a substrate surface | Electricity | 0 | Active |
| US8991332B2 | Apparatus to control semiconductor film deposition characteristics | Electricity | 0 | Active |
| US12037701B2 | Multi-thermal CVD chambers with shared gas delivery and exhaust system | Chemistry; Metallurgy | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.