Inventor · Sunnyvale, CA, US

Manish Hemkar

7Patents
2h-index
28Co-inventors
47Inventor score

Filing activity: Jun 10, 2004 → Mar 31, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US7262116B2 Low temperature epitaxial growth of silicon-containing films using close proximity UV radiation Electricity 6 Expired
US7396743B2 Low temperature epitaxial growth of silicon-containing films using UV radiation Electricity 5 Expired
US7718225B2 Method to control semiconductor film deposition characteristics Electricity 2 Active
US10269614B2 Susceptor design to reduce edge thermal peak Electricity 1 Active
US8728944B2 Method of removing contaminants and native oxides from a substrate surface Electricity 0 Active
US8991332B2 Apparatus to control semiconductor film deposition characteristics Electricity 0 Active
US12037701B2 Multi-thermal CVD chambers with shared gas delivery and exhaust system Chemistry; Metallurgy 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.