Inventor · Leuven, BE

Marc Schaekers

6Patents
2h-index
22Co-inventors
47Inventor score

Filing activity: Nov 26, 1997 → Nov 8, 2016

Most-cited inventions

PatentTitleAreaCited byStatus
US6387827B1 Method for growing thin silicon oxides on a silicon substrate using chlorine precursors Electricity 327 Expired
US6844266B2 Anisotropic etching of organic-containing insulating layers Electricity 6 Expired
US7557027B2 Method of producing microcystalline silicon germanium suitable for micromachining Electricity 2 Active
US10090393B2 Method for forming a field effect transistor device having an electrical contact Electricity 1 Active
US9997458B2 Method for manufacturing germamde interconnect structures and corresponding interconnect structures Electricity 0 Active
US9633853B2 Method for forming an electrical contact Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.