Masahisa Ueda
6Patents
1h-index
16Co-inventors
44Inventor score
Filing activity: Feb 28, 2001 → Mar 22, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6495413B2 | Structure for masking integrated capacitors of particular utility for ferroelectric memory integrated circuits | Electricity | 26 | Expired |
| US9059105B2 | Ashing apparatus | Electricity | 1 | Active |
| US9305752B2 | Method for operating substrate processing apparatus | Electricity | 0 | Active |
| US9466475B2 | Ashing device | Electricity | 0 | Active |
| US10619261B2 | Manufacturing method for electronic component | Electricity | 0 | Active |
| US8133325B2 | Dry cleaning method for plasma processing apparatus | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.