Ming-Fa Wu
8Patents
1h-index
15Co-inventors
44Inventor score
Filing activity: Dec 3, 2007 → Jul 25, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7742271B2 | Apparatus and surge protecting circuit thereof | Electricity | 1 | Active |
| US10631392B2 | EUV collector contamination prevention | Physics | 1 | Active |
| US11530479B2 | Atomic layer deposition tool and method | Chemistry; Metallurgy | 1 | Active |
| US12331398B2 | Method of forming metal oxide layer using deposition apparatus | Electricity | 0 | Active |
| US11219115B2 | EUV collector contamination prevention | Physics | 0 | Active |
| US11525185B2 | Vacuum systems in semiconductor fabrication facilities | Electricity | 0 | Active |
| US12359313B2 | Deposition apparatus and method of forming metal oxide layer using the same | Electricity | 0 | Active |
| US12371780B2 | Vacuum systems in semiconductor fabrication facilities | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.