Inventor · Hsinchu, TW

Ming-Ho Tsai

8Patents
2h-index
16Co-inventors
44Inventor score

Filing activity: Dec 8, 2011 → May 27, 2024

Most-cited inventions

PatentTitleAreaCited byStatus
US9230867B2 Structure and method for E-beam in-chip overlay mark Physics 62 Active
US8736084B2 Structure and method for E-beam in-chip overlay mark Physics 62 Active
US10274817B2 Mask and photolithography system Physics 1 Active
US12021050B2 Semiconductor device Electricity 1 Active
US11469198B2 Semiconductor device manufacturing method and associated semiconductor die Electricity 0 Active
US12400987B2 Semiconductor device Electricity 0 Active
US9081293B2 System and method for lithography exposure with correction of overlay shift induced by mask heating Physics 0 Active
US11262658B2 Photomask, photolithography system and manufacturing process Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.