Minoru Toriumi
6Patents
3h-index
12Co-inventors
54Inventor score
Filing activity: Jan 5, 1987 → Mar 1, 2017
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5512328A | Method for forming a pattern and forming a thin film used in pattern formation | Emerging Cross-Sectional Technologies | 196 | Expired |
| US5621497A | Pattern forming method and projection exposure tool therefor | Physics | 18 | Expired |
| US4792516A | Photosensitive composition | Physics | 9 | Expired |
| US8163462B2 | Photosensitive composition, method for forming pattern, and method for manufacturing semiconductor device | Emerging Cross-Sectional Technologies | 2 | Active |
| US6803170B2 | Resist composition and method for manufacturing semiconductor device using the resist composition | Emerging Cross-Sectional Technologies | 2 | Expired |
| US10095108B2 | Photosensitive composition and pattern formation method | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.