Inventor · Heitersheim, DE

Norbert Munzel

8Patents
8h-index
7Co-inventors
54Inventor score

Filing activity: Aug 15, 1992 → Mar 16, 2001

Most-cited inventions

PatentTitleAreaCited byStatus
US5627011A High resolution i-line photoresist of high sensitivity Emerging Cross-Sectional Technologies 26 Expired
US5759740A High resolution i-line photoresist of high sensitivity Emerging Cross-Sectional Technologies 15 Expired
US5369200A Positive photoresist having improved processing properties Physics 14 Expired
US5296330A Positive photoresists containing quinone diazide photosensitizer, alkali-soluble resin and tetra(hydroxyphenyl) alkane additive Physics 13 Expired
US6638690B1 Method for producing multi-layer circuits Electricity 13 Expired
US5436098A Positive photoresists with enhanced resolution and reduced crystallization containing novel tetra(hydroxyphenyl)alkanes Physics 9 Expired
US5397680A Positive photoresist having improved processing properties Physics 9 Expired
US5650262A High-resolution negative photoresist with wide process latitude Emerging Cross-Sectional Technologies 8 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.