Inventor · Pleasanton, CA, US

Patrick Reilly

15Patents

5h-index

37Co-inventors

62Inventor score

Filing activity: May 28, 2010 → Feb 13, 2023

Most-cited inventions

Patent	Title	Area	Cited by	Status
US9157730B2	PECVD process	Physics	46	Active
US9721784B2	Ultra-conformal carbon film deposition	Electricity	23	Active
US9458537B2	PECVD process	Physics	8	Active
US9816187B2	PECVD process	Physics	7	Active
US8679987B2	Deposition of an amorphous carbon layer with high film density and high etch selectivity	Electricity	6	Active
US10074534B2	Ultra-conformal carbon film deposition	Electricity	5	Active
US8778813B2	Confined process volume PECVD chamber	Electricity	4	Active
US10793954B2	PECVD process	Physics	2	Active
US10060032B2	PECVD process	Physics	2	Active
US8513129B2	Planarizing etch hardmask to increase pattern density and aspect ratio	Electricity	1	Active
US9748093B2	Pulsed nitride encapsulation	Electricity	1	Active
US10030306B2	PECVD apparatus and process	Physics	1	Active
US11613812B2	PECVD process	Physics	1	Active
US9646818B2	Method of forming planar carbon layer by applying plasma power to a combination of hydrocarbon precursor and hydrogen-containing precursor	Electricity	0	Active
US11898249B2	PECVD process	Physics	0	Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.