Inventor · Aalen, DE

Paul Graupner

11Patents
5h-index
22Co-inventors
62Inventor score

Filing activity: Sep 19, 2002 → Apr 24, 2014

Most-cited inventions

PatentTitleAreaCited byStatus
US7433015B2 Lithographic apparatus and device manufacturing method Physics 35 Expired
US7545481B2 Lithographic apparatus and device manufacturing method Physics 33 Expired
US6678240B2 Method for optimizing the image properties of at least two optical elements as well as methods for optimizing the image properties of at least three optical elements Physics 14 Expired
US7715107B2 Optical element for correction of aberration, and a lithographic apparatus comprising same Physics 12 Active
US6934011B2 Method for optimizing the image properties of at least two optical elements as well as methods for optimizing the image properties of at least three optical elements Physics 5 Expired
US8174674B2 Lithographic apparatus and device manufacturing method Physics 4 Active
US9146475B2 Projection exposure system and projection exposure method Physics 3 Active
US7301622B2 Method for optimizing the image properties of at least two optical elements as well as methods for optimizing the image properties of at least three optical elements Physics 2 Expired
US8472006B2 Lithographic apparatus and device manufacturing method Physics 0 Active
US9285685B2 Lithographic apparatus and device manufacturing method Physics 0 Active
US8570486B2 Lithographic apparatus and device manufacturing method Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.