Paul Proctor
9Patents
5h-index
16Co-inventors
56Inventor score
Filing activity: Jun 18, 1992 → Oct 25, 2004
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5217920A | Method of forming substrate contact trenches and isolation trenches using anodization for isolation | Emerging Cross-Sectional Technologies | 34 | Expired |
| US6830971B2 | High K artificial lattices for capacitor applications to use in CU or AL BEOL | Electricity | 12 | Expired |
| US6664190B2 | Pre STI-CMP planarization scheme | Electricity | 11 | Expired |
| US6663472B2 | Multiple step CMP polishing | Performing Operations; Transporting | 7 | Expired |
| US6673695B1 | STI scheme to prevent fox recess during pre-CMP HF dip | Electricity | 5 | Expired |
| US6660642B2 | Toxic residual gas removal by non-reactive ion sputtering | Electricity | 4 | Expired |
| US7095073B2 | High K artificial lattices for capacitor applications to use in Cu or Al BEOL | Electricity | 3 | Expired |
| US6726545B2 | Linear polishing for improving substrate uniformity | Performing Operations; Transporting | 2 | Expired |
| US7052372B2 | Chemical-mechanical polisher hardware design | Performing Operations; Transporting | 1 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.