Inventor · Tirschenreuth, DE

Peter Baumann

7Patents
2h-index
8Co-inventors
40Inventor score

Filing activity: Oct 7, 1997 → Sep 26, 2013

Most-cited inventions

PatentTitleAreaCited byStatus
US5911335A Liner choker Performing Operations; Transporting 11 Expired
US7732308B2 Process for depositing layers containing silicon and germanium Emerging Cross-Sectional Technologies 4 Expired
US7410670B2 Process and apparatus for depositing single-component or multi-component layers and layer sequences using discontinuous injection of liquid and dissolved starting substances via a multi-channel injection unit Chemistry; Metallurgy 2 Expired
US8349081B2 Gas distributor with pre-chambers arranged in planes Chemistry; Metallurgy 1 Active
US8298337B2 Gas inlet element for a CVD reactor Chemistry; Metallurgy 1 Active
US8114480B2 Method for self-limiting deposition of one or more monolayers Chemistry; Metallurgy 0 Active
US8906456B2 Apparatus and method for high-throughput chemical vapor deposition Chemistry; Metallurgy 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.