Peter Edwards
11Patents
6h-index
18Co-inventors
59Inventor score
Filing activity: Jun 17, 1991 → May 4, 2006
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5981961A | Apparatus and method for improved scanning efficiency in an ion implanter | Electricity | 23 | Expired |
| US5149244A | Apparatus for aligning wafers within a semiconductor wafer cassette | Emerging Cross-Sectional Technologies | 12 | Expired |
| US6908836B2 | Method of implanting a substrate and an ion implanter for performing the method | Electricity | 12 | Expired |
| US7053386B1 | Method and apparatus for implanting semiconductor wafer substrates | Electricity | 11 | Expired |
| US5217341A | Method for aligning wafers within a semiconductor wafer cassette | Emerging Cross-Sectional Technologies | 10 | Expired |
| US6956223B2 | Multi-directional scanning of movable member and ion beam monitoring arrangement therefor | Electricity | 9 | Expired |
| US7049210B2 | Method of implanting a substrate and an ion implanter for performing the method | Electricity | 6 | Expired |
| US7282427B1 | Method of implanting a substrate and an ion implanter for performing the method | Electricity | 4 | Expired |
| US7253424B2 | Method of implanting a substrate and an ion implanter for performing the method | Electricity | 3 | Expired |
| US6392245B1 | Scanning wheel for ion implantation process chamber | Electricity | 2 | Expired |
| US7235797B2 | Method of implanting a substrate and an ion implanter for performing the method | Electricity | 1 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.