Inventor · Fremont, CA, US

Robert Luke Anderson

10Patents
5h-index
19Co-inventors
63Inventor score

Filing activity: Sep 19, 1997 → Dec 11, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US6955588B1 Method of and platen for controlling removal rate characteristics in chemical mechanical planarization Performing Operations; Transporting 29 Expired
US6113478A Polishing apparatus with improved alignment of polishing plates Performing Operations; Transporting 15 Expired
US6001005A Polishing apparatus Performing Operations; Transporting 14 Expired
US5957763A Polishing apparatus with support columns supporting multiple platform members Performing Operations; Transporting 9 Expired
US7004825B1 Apparatus and associated method for conditioning in chemical mechanical planarization Performing Operations; Transporting 8 Expired
US6752898B1 Method and apparatus for an air bearing platen with raised topography Performing Operations; Transporting 4 Expired
US11502353B2 Thermal storage device for batteries Emerging Cross-Sectional Technologies 2 Active
US11870049B2 Thermal storage device for batteries Emerging Cross-Sectional Technologies 1 Active
US8545639B2 Method of cleaning aluminum plasma chamber parts Chemistry; Metallurgy 1 Active
US12249701B2 Thermal storage device for batteries Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.