Robert Luke Anderson
10Patents
5h-index
19Co-inventors
63Inventor score
Filing activity: Sep 19, 1997 → Dec 11, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6955588B1 | Method of and platen for controlling removal rate characteristics in chemical mechanical planarization | Performing Operations; Transporting | 29 | Expired |
| US6113478A | Polishing apparatus with improved alignment of polishing plates | Performing Operations; Transporting | 15 | Expired |
| US6001005A | Polishing apparatus | Performing Operations; Transporting | 14 | Expired |
| US5957763A | Polishing apparatus with support columns supporting multiple platform members | Performing Operations; Transporting | 9 | Expired |
| US7004825B1 | Apparatus and associated method for conditioning in chemical mechanical planarization | Performing Operations; Transporting | 8 | Expired |
| US6752898B1 | Method and apparatus for an air bearing platen with raised topography | Performing Operations; Transporting | 4 | Expired |
| US11502353B2 | Thermal storage device for batteries | Emerging Cross-Sectional Technologies | 2 | Active |
| US11870049B2 | Thermal storage device for batteries | Emerging Cross-Sectional Technologies | 1 | Active |
| US8545639B2 | Method of cleaning aluminum plasma chamber parts | Chemistry; Metallurgy | 1 | Active |
| US12249701B2 | Thermal storage device for batteries | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.