Roy Winston Pascal
8Patents
4h-index
7Co-inventors
39Inventor score
Filing activity: Dec 3, 1999 → Apr 26, 2002
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6240588A | Wafer scrubbing brush core | Performing Operations; Transporting | 16 | Expired |
| US6543084B2 | Wafer scrubbing brush core | Performing Operations; Transporting | 15 | Expired |
| US6415804B1 | Bowl for processing semiconductor wafers | Emerging Cross-Sectional Technologies | 9 | Expired |
| US6612315B2 | Bowl, spin, rinse, and dry module, and method for loading a semiconductor wafer into a spin, rinse, and dry module | Emerging Cross-Sectional Technologies | 6 | Expired |
| US6497241B1 | Hollow core spindle and spin, rinse, and dry module including the same | Emerging Cross-Sectional Technologies | 4 | Expired |
| US6505417B2 | Method for controlling airflow on a backside of a semiconductor wafer during spin processing | Electricity | 1 | Expired |
| US6558474B1 | Method for rinsing the backside of a semiconductor wafer | Emerging Cross-Sectional Technologies | 0 | Expired |
| US6434775B1 | Nozzle for rinsing the backside of a semiconductor wafer | Emerging Cross-Sectional Technologies | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.