Seiichiro Okuda
10Patents
8h-index
12Co-inventors
61Inventor score
Filing activity: Jul 16, 1996 → May 10, 2004
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5762709A | Substrate spin coating apparatus | Performing Operations; Transporting | 40 | Expired |
| US6550988B2 | Substrate processing apparatus | Emerging Cross-Sectional Technologies | 38 | Expired |
| US6805769B2 | Substrate processing apparatus | Performing Operations; Transporting | 29 | Expired |
| US5788773A | Substrate spin treating method and apparatus | Emerging Cross-Sectional Technologies | 24 | Expired |
| US6000862A | Substrate developing method and apparatus | Physics | 19 | Expired |
| US7418970B2 | Substrate processing apparatus for drying substrate | Emerging Cross-Sectional Technologies | 17 | Expired |
| US7479205B2 | Substrate processing apparatus | Performing Operations; Transporting | 11 | Expired |
| US6951221B2 | Substrate processing apparatus | Emerging Cross-Sectional Technologies | 10 | Expired |
| US7267130B2 | Substrate processing apparatus | Emerging Cross-Sectional Technologies | 6 | Expired |
| US7428907B2 | Substrate processing apparatus | Emerging Cross-Sectional Technologies | 1 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.