Sergey Tarabrin
9Patents
1h-index
26Co-inventors
40Inventor score
Filing activity: Aug 22, 2017 → Jul 7, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10795269B2 | Method of determining a value of a parameter of interest, method of cleaning a signal containing information about a parameter of interest, device manufacturing method | Physics | 2 | Active |
| US10599048B2 | Metrology apparatus, method of measuring a structure, device manufacturing method | Physics | 1 | Active |
| US10691031B2 | Method and apparatus to determine a patterning process parameter | Physics | 1 | Active |
| US11150563B2 | Method of measuring a parameter of a patterning process, metrology apparatus, target | Physics | 1 | Active |
| US10598483B2 | Metrology method, apparatus and computer program | Physics | 1 | Active |
| US10585048B2 | Method of determining a value of a parameter of interest of a target formed by a patterning process | Physics | 0 | Active |
| US11042100B2 | Measurement apparatus and method of measuring a target | Physics | 0 | Active |
| US12105432B2 | Metrology method and associated computer product | Physics | 0 | Active |
| US11409204B2 | Method and apparatus to determine a patterning process parameter | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.