Sheng Guo
8Patents
1h-index
36Co-inventors
40Inventor score
Filing activity: Dec 1, 2020 → Nov 2, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11555250B2 | Organic contamination free surface machining | Electricity | 1 | Active |
| US11932950B2 | Organic contamination free surface machining | Electricity | 0 | Active |
| US12261012B2 | Plasma treatment apparatus, lower electrode assembly and forming method thereof | Electricity | 0 | Active |
| US11854773B2 | Remote plasma cleaning of chambers for electronics manufacturing systems | Electricity | 0 | Active |
| US12325945B2 | Isolation type tunnel washer for cleaning clothes against secondary pollution | Emerging Cross-Sectional Technologies | 0 | Active |
| US12249494B2 | Remote plasma cleaning of chambers for electronics manufacturing systems | Electricity | 0 | Active |
| US11772137B2 | Reactive cleaning of substrate support | Electricity | 0 | Active |
| US12123089B2 | Method and apparatus for forming a plasma resistant coating, component, and plasma processing apparatus | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.