Sheng-Wei Wu
14Patents
2h-index
24Co-inventors
50Inventor score
Filing activity: Aug 23, 2013 → Jan 26, 2024
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9072174B2 | Electronic device | Physics | 9 | Active |
| US10962285B2 | Wafer drying system | Electricity | 2 | Active |
| US9461404B2 | Connector | Emerging Cross-Sectional Technologies | 2 | Active |
| US11581199B2 | Wafer drying system | Electricity | 0 | Active |
| US12257610B2 | Apparatus and method for wafer cleaning | Performing Operations; Transporting | 0 | Active |
| US10943804B2 | Monitoring of process chamber | Physics | 0 | Active |
| US9325417B2 | Optical-electrical converter | Physics | 0 | Active |
| US11927392B2 | Wafer drying system | Electricity | 0 | Active |
| US11282728B2 | Contamination control in semiconductor manufacturing systems | Electricity | 0 | Active |
| US11766703B2 | Apparatus and method for wafer cleaning | Performing Operations; Transporting | 0 | Active |
| US12020964B2 | Contamination control in semiconductor manufacturing systems | Electricity | 0 | Active |
| US11958090B2 | Apparatus and method for wafer cleaning | Performing Operations; Transporting | 0 | Active |
| US9605345B2 | Vertical furnace for improving wafer uniformity | Chemistry; Metallurgy | 0 | Active |
| US9312957B2 | Optical transceiver device | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.