Inventor · Lauchheim, DE

Stephan Kellner

6Patents
2h-index
18Co-inventors
40Inventor score

Filing activity: Jul 19, 2011 → Nov 27, 2019

Most-cited inventions

PatentTitleAreaCited byStatus
US8873023B2 Illumination system for microlithography Physics 4 Active
US9280060B2 Illumination system for microlithography Physics 3 Active
US9606441B2 Illumination system for microlithography Physics 1 Active
US10088754B2 Illumination system for microlithography Physics 0 Active
US9448490B2 EUV lithography system Physics 0 Active
US11143075B2 Exhaust gas aftertreatment system and method for exhaust gas aftertreatment in an internal combustion engine Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.