Steven E. Staller
14Patents
12h-index
17Co-inventors
75Inventor score
Filing activity: Sep 4, 1990 → Dec 5, 2012
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6428713B1 | MEMS sensor structure and microfabrication process therefor | Performing Operations; Transporting | 58 | Expired |
| US5068203A | Method for forming thin silicon membrane or beam | Emerging Cross-Sectional Technologies | 53 | Expired |
| US5221400A | Method of making a microaccelerometer having low stress bonds and means for preventing excessive z-axis deflection | Emerging Cross-Sectional Technologies | 47 | Expired |
| US5706565A | Method for making an all-silicon capacitive pressure sensor | Emerging Cross-Sectional Technologies | 45 | Expired |
| US6750152B1 | Method and apparatus for electrically testing and characterizing formation of microelectric features | Electricity | 35 | Expired |
| US5413955A | Method of bonding silicon wafers at temperatures below 500 degrees centigrade for sensor applications | Emerging Cross-Sectional Technologies | 32 | Expired |
| US5936164A | All-silicon capacitive pressure sensor | Physics | 31 | Expired |
| US6074891A | Process for verifying a hermetic seal and semiconductor device therefor | Performing Operations; Transporting | 30 | Expired |
| US5721162A | All-silicon monolithic motion sensor with integrated conditioning circuit | Physics | 26 | Expired |
| US6555856B1 | Semiconductor device with means for verifying a hermetic seal therefor | Performing Operations; Transporting | 18 | Expired |
| US5284057A | Microaccelerometer having low stress bonds and means for preventing excessive Z-axis deflection | Emerging Cross-Sectional Technologies | 15 | Expired |
| US5369057A | Method of making and sealing a semiconductor device having an air path therethrough | Emerging Cross-Sectional Technologies | 13 | Expired |
| US5415726A | Method of making a bridge-supported accelerometer structure | Physics | 12 | Expired |
| US8754512B1 | Atomic level bonding for electronics packaging | Electricity | 2 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.