Tetsuya Mori
68Patents
13h-index
97Co-inventors
87Inventor score
Filing activity: Jun 3, 1987 → Oct 4, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6934134B2 | Direct current load breaking contact point constitution and switching mechanism therewith | Electricity | 202 | Expired |
| US5309197A | Projection exposure apparatus | Physics | 57 | Expired |
| US5751404A | Exposure apparatus and method wherein alignment is carried out by comparing marks which are incident on both reticle stage and wafer stage reference plates | Physics | 33 | Expired |
| US5166754A | Alignment system | Physics | 32 | Expired |
| US5331371A | Alignment and exposure method | Physics | 32 | Expired |
| US4800655A | Solvent recovery system | Emerging Cross-Sectional Technologies | 28 | Expired |
| US8588566B2 | Electronic apparatus, cellular phone, flexible cable and method for manufacturing optical waveguide forming body | Electricity | 26 | Active |
| US5268744A | Method of positioning a wafer with respect to a focal plane of an optical system | Physics | 26 | Expired |
| US5731193A | Recombinant DNA and transformant containing the same | Chemistry; Metallurgy | 23 | Expired |
| US8725312B2 | System for obtaining information in vehicle | Electricity | 17 | Active |
| US6091481A | Positioning method and projection exposure apparatus using the method | Physics | 16 | Expired |
| US5594549A | Position detecting method and projection exposure apparatus using the same | Physics | 15 | Expired |
| US9151888B2 | Optical waveguide and electronic device | Physics | 13 | Active |
| US5814425A | Method of measuring exposure condition and/or aberration of projection optical system | Physics | 12 | Expired |
| US5971577A | Light source device and illumination system | Physics | 11 | Expired |
| US6608666B2 | Reference plate, exposure apparatus, device manufacturing system, device manufacturing method, semiconductor manufacturing factory, and exposure apparatus maintenance method | Physics | 8 | Expired |
| US7113813B2 | Mobile communication terminal and electro-acoustic transducer used for the same | Electricity | 7 | Expired |
| US7820356B2 | Optical waveguides and methods thereof | Emerging Cross-Sectional Technologies | 5 | Active |
| US8896835B2 | Gas measurement apparatus and the setting method of width of wavelength modulation in gas measurement apparatus | Physics | 5 | Active |
| US8087230B2 | Exhaust system for motor vehicles | Emerging Cross-Sectional Technologies | 4 | Active |
| US7237522B2 | Intake system for combustion engine | Emerging Cross-Sectional Technologies | 4 | Expired |
| US8934101B2 | Gas analysis apparatus | Physics | 4 | Active |
| US8200058B2 | Light guide and light guide structure | Physics | 3 | Active |
| US6827783B2 | Paste application apparatus and method for applying paste | Electricity | 3 | Expired |
| US8249442B2 | Flash unit and imaging apparatus | Physics | 3 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.