Thomas Parrill
7Patents
4h-index
13Co-inventors
50Inventor score
Filing activity: Dec 18, 1998 → Jun 28, 2010
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6828572B2 | Ion beam incident angle detector for ion implant systems | Electricity | 16 | Expired |
| US8242468B2 | Ion implanter for photovoltaic cell fabrication | Electricity | 13 | Active |
| US7687786B2 | Ion implanter for noncircular wafers | Electricity | 7 | Active |
| US6287983A | Selective nitride etching with silicate ion pre-loading | Electricity | 5 | Expired |
| US6228741A | Method for trench isolation of semiconductor devices | Electricity | 4 | Expired |
| US7750322B2 | Ion implanter for photovoltaic cell fabrication | Electricity | 3 | Active |
| US7897945B2 | Hydrogen ion implanter using a broad beam source | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.