Inventor · Andover, MA, US

Thomas Parrill

7Patents
4h-index
13Co-inventors
50Inventor score

Filing activity: Dec 18, 1998 → Jun 28, 2010

Most-cited inventions

PatentTitleAreaCited byStatus
US6828572B2 Ion beam incident angle detector for ion implant systems Electricity 16 Expired
US8242468B2 Ion implanter for photovoltaic cell fabrication Electricity 13 Active
US7687786B2 Ion implanter for noncircular wafers Electricity 7 Active
US6287983A Selective nitride etching with silicate ion pre-loading Electricity 5 Expired
US6228741A Method for trench isolation of semiconductor devices Electricity 4 Expired
US7750322B2 Ion implanter for photovoltaic cell fabrication Electricity 3 Active
US7897945B2 Hydrogen ion implanter using a broad beam source Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.