Inventor · Hamburg, DE

Thomas Rohleder

6Patents
3h-index
6Co-inventors
39Inventor score

Filing activity: Dec 20, 2012 → Sep 30, 2015

Most-cited inventions

PatentTitleAreaCited byStatus
US9847258B2 Plasma dicing with blade saw patterned underside mask Electricity 13 Active
US8809166B2 High die strength semiconductor wafer processing method and system Performing Operations; Transporting 8 Active
US9601437B2 Plasma etching and stealth dicing laser process Electricity 6 Active
US8895363B2 Die preparation for wafer-level chip scale package (WLCSP) Electricity 3 Active
US9812361B2 Combination grinding after laser (GAL) and laser on-off function to increase die strength Electricity 1 Active
US9349645B2 Apparatus, device and method for wafer dicing Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.