Tomohide Jozaki
11Patents
7h-index
12Co-inventors
59Inventor score
Filing activity: Oct 25, 1993 → Feb 13, 2003
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6063710A | Method and apparatus for dry etching with temperature control | Electricity | 38 | Expired |
| US5981913A | Static electricity chuck and wafer stage | Emerging Cross-Sectional Technologies | 34 | Expired |
| US5968273A | Wafer stage for manufacturing a semiconductor device | Electricity | 32 | Expired |
| US5431769A | Method and system for plasma treatment | Electricity | 24 | Expired |
| US6174408A | Method and apparatus for dry etching | Electricity | 22 | Expired |
| US6084763A | Method of holding wafer, method of removing wafer and electrostatic chucking device | Emerging Cross-Sectional Technologies | 13 | Expired |
| US6204193A | Method for etching | Electricity | 7 | Expired |
| US6320737A | Electrostatic chucking device | Emerging Cross-Sectional Technologies | 7 | Expired |
| US6235655A | Semiconductor manufacturing system and semiconductor manufacturing method | Electricity | 5 | Expired |
| US7036673B2 | Lot management production method and product carrying container | Emerging Cross-Sectional Technologies | 3 | Expired |
| US6655000B2 | Lot management production method and product carrying container | Emerging Cross-Sectional Technologies | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.