Toru Kakuda
8Patents
2h-index
12Co-inventors
44Inventor score
Filing activity: Nov 29, 2011 → Jul 14, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9911580B2 | Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus | Electricity | 3 | Active |
| US10763084B2 | Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus | Electricity | 2 | Active |
| US9793112B2 | Method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Electricity | 1 | Active |
| US12087598B2 | Substrate processing apparatus | Electricity | 1 | Active |
| US11101111B2 | Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus | Electricity | 1 | Active |
| US11948778B2 | Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus | Electricity | 0 | Active |
| US11168396B2 | Method of manufacturing semiconductor device and recording medium | Electricity | 0 | Active |
| US10985017B2 | Method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.