Inventor · Freeport, NY, US

Viktor Kanarov

12Patents
7h-index
20Co-inventors
66Inventor score

Filing activity: Sep 7, 1999 → Aug 19, 2020

Most-cited inventions

PatentTitleAreaCited byStatus
US7183716B2 Charged particle source and operation thereof Electricity 25 Expired
US6716322B1 Method and apparatus for controlling film profiles on topographic features Chemistry; Metallurgy 10 Expired
US6590324B1 Charged particle beam extraction and formation apparatus Electricity 8 Expired
US8835869B2 Ion sources and methods for generating an ion beam with controllable ion current density distribution Electricity 8 Active
US7557362B2 Ion sources and methods for generating an ion beam with a controllable ion current density distribution Electricity 7 Active
US8158016B2 Methods of operating an electromagnet of an ion source Electricity 7 Active
US7879201B2 Method and apparatus for surface processing of a substrate Chemistry; Metallurgy 7 Active
US6774550B2 Charged particle beam extraction and formation apparatus Electricity 3 Expired
US9206500B2 Method and apparatus for surface processing of a substrate using an energetic particle beam Electricity 3 Active
US7414355B2 Charged particle beam extraction and formation apparatus Electricity 2 Expired
US7005782B2 Charged particle beam extraction and formation apparatus Electricity 2 Expired
US11466360B2 Enhanced cathodic ARC source for ARC plasma deposition Chemistry; Metallurgy 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.