Viktor Kanarov
12Patents
7h-index
20Co-inventors
66Inventor score
Filing activity: Sep 7, 1999 → Aug 19, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7183716B2 | Charged particle source and operation thereof | Electricity | 25 | Expired |
| US6716322B1 | Method and apparatus for controlling film profiles on topographic features | Chemistry; Metallurgy | 10 | Expired |
| US6590324B1 | Charged particle beam extraction and formation apparatus | Electricity | 8 | Expired |
| US8835869B2 | Ion sources and methods for generating an ion beam with controllable ion current density distribution | Electricity | 8 | Active |
| US7557362B2 | Ion sources and methods for generating an ion beam with a controllable ion current density distribution | Electricity | 7 | Active |
| US8158016B2 | Methods of operating an electromagnet of an ion source | Electricity | 7 | Active |
| US7879201B2 | Method and apparatus for surface processing of a substrate | Chemistry; Metallurgy | 7 | Active |
| US6774550B2 | Charged particle beam extraction and formation apparatus | Electricity | 3 | Expired |
| US9206500B2 | Method and apparatus for surface processing of a substrate using an energetic particle beam | Electricity | 3 | Active |
| US7414355B2 | Charged particle beam extraction and formation apparatus | Electricity | 2 | Expired |
| US7005782B2 | Charged particle beam extraction and formation apparatus | Electricity | 2 | Expired |
| US11466360B2 | Enhanced cathodic ARC source for ARC plasma deposition | Chemistry; Metallurgy | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.