Inventor · Dresden, DE

Vlad Temchenko

6Patents
1h-index
6Co-inventors
40Inventor score

Filing activity: May 14, 2007 → Feb 18, 2020

Most-cited inventions

PatentTitleAreaCited byStatus
US10593678B1 Methods of forming semiconductor devices using aspect ratio dependent etching effects, and related semiconductor devices Physics 2 Active
US8715910B2 Method for exposing an area on a substrate to a beam and photolithographic system Physics 0 Active
US7880863B2 Lithography system with illumination monitor Physics 0 Active
US10991700B2 Methods of forming semiconductor devices using aspect ratio dependent etching effects, and related memory devices and electronic systems Physics 0 Active
US7738160B2 Optical components, illumination systems, and methods Physics 0 Active
US7910265B2 Reticle for use in a semiconductor lithographic system and method for modifying the same Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.