Walter Franken
6Patents
3h-index
11Co-inventors
54Inventor score
Filing activity: Apr 10, 1979 → Nov 18, 2015
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9045818B2 | Shadow mask held magnetically on a substrate support | Electricity | 10 | Active |
| US4253963A | Asymmetrical ultrafiltration membrane on the basis of cellulose triacetate | Performing Operations; Transporting | 6 | Expired |
| US7056388B2 | Reaction chamber with at least one HF feedthrough | Electricity | 3 | Expired |
| US8308867B2 | Device for the temperature control of the surface temperatures of substrates in a CVD reactor | Chemistry; Metallurgy | 2 | Active |
| US10822701B2 | CVD or PVD reactor for coating large-area substrates | Chemistry; Metallurgy | 0 | Active |
| US9847241B2 | Transport module for a semiconductor fabrication device or coupling device | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.