Inventor · Eschweiler, DE

Walter Franken

6Patents
3h-index
11Co-inventors
54Inventor score

Filing activity: Apr 10, 1979 → Nov 18, 2015

Most-cited inventions

PatentTitleAreaCited byStatus
US9045818B2 Shadow mask held magnetically on a substrate support Electricity 10 Active
US4253963A Asymmetrical ultrafiltration membrane on the basis of cellulose triacetate Performing Operations; Transporting 6 Expired
US7056388B2 Reaction chamber with at least one HF feedthrough Electricity 3 Expired
US8308867B2 Device for the temperature control of the surface temperatures of substrates in a CVD reactor Chemistry; Metallurgy 2 Active
US10822701B2 CVD or PVD reactor for coating large-area substrates Chemistry; Metallurgy 0 Active
US9847241B2 Transport module for a semiconductor fabrication device or coupling device Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.