Walter Glenn
10Patents
5h-index
15Co-inventors
55Inventor score
Filing activity: Apr 16, 2002 → Aug 20, 2010
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6784096B2 | Methods and apparatus for forming barrier layers in high aspect ratio vias | Electricity | 114 | Expired |
| US6866746B2 | Clamshell and small volume chamber with fixed substrate support | Electricity | 75 | Expired |
| US7175713B2 | Apparatus for cyclical deposition of thin films | Electricity | 59 | Expired |
| US6932871B2 | Multi-station deposition apparatus and method | Electricity | 50 | Expired |
| US6974771B2 | Methods and apparatus for forming barrier layers in high aspect ratio vias | Electricity | 36 | Expired |
| US7547644B2 | Methods and apparatus for forming barrier layers in high aspect ratio vias | Electricity | 3 | Active |
| US8123860B2 | Apparatus for cyclical depositing of thin films | Electricity | 3 | Active |
| US7547465B2 | Multi-station deposition apparatus and method | Electricity | 2 | Active |
| US7923069B2 | Multi-station deposition apparatus and method | Electricity | 2 | Active |
| US7794789B2 | Multi-station deposition apparatus and method | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.