Weibo Yu
8Patents
1h-index
17Co-inventors
40Inventor score
Filing activity: Sep 24, 2011 → Sep 12, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8735252B2 | Method of semiconductor integrated circuit fabrication | Electricity | 9 | Active |
| US9776216B2 | Dispensing apparatus and dispensing method | Electricity | 1 | Active |
| US10276469B2 | Method for forming semiconductor device structure | Electricity | 0 | Active |
| US9704714B2 | Method for controlling surface charge on wafer surface in semiconductor fabrication | Electricity | 0 | Active |
| US8932962B2 | Chemical dispensing system and method | Electricity | 0 | Active |
| US10840102B2 | Integrated system, integrated system operation method and film treatment method | Electricity | 0 | Active |
| US9355874B2 | Silicon nitride etching in a single wafer apparatus | Electricity | 0 | Active |
| US12053745B2 | System for storing chemical liquid and method for adjusting gas concentration in chemical liquid | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.