Weinan Jiang
9Patents
7h-index
27Co-inventors
63Inventor score
Filing activity: Oct 1, 1996 → Jun 28, 2016
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6699399B1 | Self-cleaning etch process | Emerging Cross-Sectional Technologies | 458 | Expired |
| US6136211A | Self-cleaning etch process | Emerging Cross-Sectional Technologies | 94 | Expired |
| US5978202A | Electrostatic chuck having a thermal transfer regulator pad | Emerging Cross-Sectional Technologies | 45 | Expired |
| US5893643A | Apparatus for measuring pedestal temperature in a semiconductor wafer processing system | Electricity | 23 | Expired |
| US6617257B2 | Method of plasma etching organic antireflective coating | Electricity | 21 | Expired |
| US5851926A | Method for etching transistor gates using a hardmask | Electricity | 13 | Expired |
| US6855567B1 | Etch endpoint detection | Electricity | 7 | Expired |
| US8480913B2 | Plasma processing method and apparatus with control of plasma excitation power | Electricity | 1 | Active |
| US10452663B2 | Group user level association method and system | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.