Inventor · Nanhu, CN

Weinan Jiang

9Patents
7h-index
27Co-inventors
63Inventor score

Filing activity: Oct 1, 1996 → Jun 28, 2016

Most-cited inventions

PatentTitleAreaCited byStatus
US6699399B1 Self-cleaning etch process Emerging Cross-Sectional Technologies 458 Expired
US6136211A Self-cleaning etch process Emerging Cross-Sectional Technologies 94 Expired
US5978202A Electrostatic chuck having a thermal transfer regulator pad Emerging Cross-Sectional Technologies 45 Expired
US5893643A Apparatus for measuring pedestal temperature in a semiconductor wafer processing system Electricity 23 Expired
US6617257B2 Method of plasma etching organic antireflective coating Electricity 21 Expired
US5851926A Method for etching transistor gates using a hardmask Electricity 13 Expired
US6855567B1 Etch endpoint detection Electricity 7 Expired
US8480913B2 Plasma processing method and apparatus with control of plasma excitation power Electricity 1 Active
US10452663B2 Group user level association method and system Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.