Werner Blersch
6Patents
6h-index
11Co-inventors
52Inventor score
Filing activity: Oct 24, 1997 → Mar 5, 2003
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6311016A | Substrate temperature measuring apparatus, substrate temperature measuring method, substrate heating method and heat treatment apparatus | Electricity | 453 | Expired |
| US6903262B2 | Shielding element for electric and/or electronic components of an electric and/or electronic circuit | Electricity | 33 | Expired |
| US5965047A | Rapid thermal processing (RTP) system with rotating substrate | Electricity | 29 | Expired |
| US6614005B1 | Device and method for thermally treating substrates | Electricity | 19 | Expired |
| US6775471B2 | Method and device for thermally treating objects | Physics | 8 | Expired |
| US6316747A | Apparatus for the thermal treatment of substrates | Electricity | 8 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.